Al${}_3$Sc thin films for advanced interconnect applications

Jean-Philippe Soulié, Kiroubanand Sankaran, Valeria Founta +7

Al${}_x$Sc${}_{1-x}$ thin films have been studied with compositions around Al${}_3$Sc ($x$ = 0.75) for potential interconnect metallization applications. As-deposited 25 nm thick films w…