collaborators

1 paper

cond-mat.mtrl-sci2026

Crystalline b-Ga2O3 thin films deposited via reactive magnetron sputtering of a liquid Ga target

Petr Novak, Jan Koloros, Stanislav Haviar +2

Ga2O3 thin films were deposited by reactive magnetron sputtering from a liquid gallium target. The influence of deposition temperature, substrate type, and discharge parameters on…