2 papers
eess.SY2023
Nonsmooth-Optimization-Based Bandwidth Optimal Control for Precision Motion Systems
Jingjie Wu, Lei Zhou
Precision motion systems are at the core of various manufacturing equipment. The rapidly increasing demand for higher productivity necessitates higher control bandwidth in the moti…
eess.SY2023
FleXstage: Lightweight Magnetically Levitated Precision Stage with Over-Actuation towards High-Throughput IC Manufacturing
Jingjie Wu, Lei Zhou
Precision motion stages play a critical role in various manufacturing and inspection equipment, for example, the wafer/reticle scanning in photolithography scanners and positioning…