2 papers
cond-mat.mes-hall2023
Universal Deoxidation of Semiconductor Substrates Assisted by Machine-Learning and Real-Time-Feedback-Control
Chao Shen, Wenkang Zhan, Jian Tang +4
Thin film deposition is an essential step in the semiconductor process. During preparation or loading, the substrate is exposed to the air unavoidably, which has motivated studies…
cond-mat.mtrl-sci2023
Epitaxial growth of high-quality GaAs on Si(001) using ultrathin buffer layers
Kun Cheng, Tianyi Tang, Wenkang Zhan +4
The direct growth of III-V semiconductors on silicon holds tremendous potential for photonics applications. However, the inherent differences in their properties lead to defects in…