Demonstration and STEM Analysis of Ferroelectric Switching in MOCVD-Grown Single Crystalline Al${}_{0.85}$Sc${}_{0.15}$N

Niklas Wolff, Georg Schoenweger, Isabel Streicher +10

Wurtzite-type Al${}_{1-x}$Sc${}_x$N solid solutions grown by metal organic chemical vapour deposition are for the first time confirmed to be ferroelectric. The film with 230 nm thickne…