77 citations · 87 across the 2 of their papers we have counts for
2 papers
cond-mat.mtrl-sci2002★ 10 cited
A Novel Predictive Tool in Nanoengineering: Straightforward Estimation of Superconformal Filling Efficiency
A. De Virgiliis, O. Azzaroni, R. C. Salvarezza +1
It is shown that the superconformal filling (SCF) efficiency () of nano-scale cavities can be rationalized in terms of relevant physical and geometric parameters. Based on…
cond-mat.stat-mech2000★ 77 cited
Dynamics of Rough Interfaces in Chemical Vapor Deposition: Experiments and a Model for Silica Films
Fernando Ojeda, Rodolfo Cuerno, Roberto Salvarezza +1
We study the surface dynamics of silica films grown by low pressure chemical vapor deposition. Atomic force microscopy measurements show that the surface reaches a scale invariant…