A Novel Predictive Tool in Nanoengineering: Straightforward Estimation of Superconformal Filling Efficiency

A. De Virgiliis, O. Azzaroni, R. C. Salvarezza +1

It is shown that the superconformal filling (SCF) efficiency (${\epsilon }_{SCF}$) of nano-scale cavities can be rationalized in terms of relevant physical and geometric parameters. Based on…