15 citations · 29 across the 3 of their papers we have counts for
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cond-mat.mtrl-sci2024★ 12 cited
Towards metal electrode interface scavenging of rare-earth scandates: A Sc2O3 and Gd2O3 study
María Ángela Pampillón, Pedro Carlos Feijoo, Enrique San Andrés +4
AmorphousGd2O3 and Sc2O3 thin films were deposited on Si by high-pressure sputtering (HPS). In order to reduce the uncontrolled interfacial SiOx growth, firstly a metallic film of…
cond-mat.mtrl-sci2024★ 15 cited
Optimization of scandium oxide growth by high pressure sputtering on silicon
Pedro Carlos Feijoo, María Ángela Pampillón, Enrique San Andrés +1
This work demonstrates the viability of scandium oxide deposition on silicon by means of high pressure sputtering. Deposition pressure and radio frequency power are varied for opti…