116 citations · 446 across the 18 of their papers we have counts for
Showing 2021Show all
2 papers · 1 filter
physics.ins-det2021★ 7 cited
A constant pressure flowmeter for extreme-high vacuum
S. Eckel, D. S. Barker, J. Fedchak +3
We demonstrate operation of a constant-pressure flowmeter capable of generating and accurately measuring flows as low as mol/s. Generation of such small flows is…
physics.ins-det2021
Stability of bakeable capacitance diaphragm gauges
Julia Scherschligt, Daniel Barker, Stephen Eckel +2
Here, we study the stability of capacitance diaphragm gauges. We focus on their stability before and after a controlled series of bakes. We find that baking results in appreciable…