Tailoring the Nucleation and Growth of Silver Nanoparticles by Sputtering Deposition under Acoustic Wave Activation. Assessment of Plasma Conditions and 2D Patterning Phenomena

Helene Reichel, Aurelio Garcia-Valenzuela, Jose Andres Espino-Roman +8

Early results on the plasma deposition of dielectric thin films on acoustic wave (AW) activated substrates revealed a densification pattern arisen from the focusing of plasma ions…