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Exploring Dielectric Properties in Models of Amorphous Boron Nitride
Thomas Galvani, Ali K. Hamze, Laura Caputo +8
We report a theoretical study of dielectric properties of models of amorphous Boron Nitride, using interatomic potentials generated by machine learning. We first perform first-prin…
Amorphous Boron Nitride as an Ultrathin Copper Diffusion Barrier for Advanced Interconnects
Onurcan Kaya, Hyeongjoon Kim, Byeongkyu Kim +7
This study focuses on amorphous boron nitride (-BN) as a novel diffusion barrier for advanced semiconductor technology, particularly addressing the critical challenge of cop…
Impact of Hydrogenation on the Stability and Mechanical Properties of Amorphous Boron Nitride
Onurcan Kaya, Luigi Colombo, Aleandro Antidormi +4
Interconnect materials with ultralow dielectric constant, and good thermal and mechanical properties are crucial for the further miniaturization of electronic devices. Recently, it…