Bessel-beam direct-write of the etch-mask in a nano-film of alumina for high-efficiency Si solar cells

Tomas Katkus, Soon Hock Ng, Haoran Mu +14

Large surface area applications such as high-efficiency > 26% solar cells require surface patterning with 1-10 micrometers periodic patterns at high fidelity over 1-10 cm^2 areas (…