Tracking visible pulsed laser annealing of Hf${}_{0.5}$Zr${}_{0.5}$O${}_2$ heterostructures with in situ transmission electron microscopy

Aida Amini, Shruti Verma, Katharina Kohlmann +4

Laser annealing offers a promising route to back end of the line fabrication of ferroelectric thin film transistors based on hafnium-zirconium oxide (HZO). Due to the wide band gap…