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physics.app-ph2024
Surface figure correction using differential deposition of WSi
Ch. Morawe, P. Bras, S. Labouré +2
The surface figure of an x-ray mirror was improved by differential deposition of WSi layers. DC magnetron sputtering through beam-defining apertures was applied on moving subst…
physics.app-ph2023
Differential deposition applied to x-ray mirror substrate
Patrice Bras, Sylvain Labouré, Amparo Vivo +2
The process of differential deposition is currently applied at the ESRF in order to correct figure errors of x-ray optics substrates, prior to multilayer deposition. The substrate…