most citedMeasurement of phosphorus segregation in silicon at the atomic-scale using STM

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cond-mat2003★ 58 cited

Measurement of phosphorus segregation in silicon at the atomic-scale using STM

Lars Oberbeck, Neil J. Curson, Toby Hallam +3

In order to fabricate precise atomic-scale devices in silicon using a combination of scanning tunnelling microscopy (STM) and molecular beam epitaxy it is necessary to minimize the…