most citedRole of microstructure in porous silicon gas sensors for NO

31 citations · 31 across the 1 of their papers we have counts for

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1 paper

cond-mat.mtrl-sci2003★ 31 cited

Role of microstructure in porous silicon gas sensors for NO

Zeno Gaburro, Paolo Bettotti, Massimo Saiani +4

Electrical conductivity of porous silicon fabricated form heavily doped p-type silicon is very sensitive to NO, even at concentrations below 100 ppb. However, sensitivity stron…