Unraveling the Defect Physics of SiC Micropipe Sidewalls by Non-Line-of-Sight Confocal Spectromicroscopy: Amphoteric Giant Traps

Irwan Saleh Kurniawan, Russel Cruz Sevilla, Ruth Jeane Soebroto +6

Micropipes are among the most detrimental defects in SiC wafer and are closely linked to catastrophic device failure. However, the microscopic defect nature of their internal sidew…