most citedMapping the potential within a nanoscale undoped GaAs region using a scanning electron microscope

20 citations · 20 across the 1 of their papers we have counts for

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cond-mat.mtrl-sci2004★ 20 cited

Mapping the potential within a nanoscale undoped GaAs region using a scanning electron microscope

B. Kaestner, C. Rodenburg, C. J. Humphreys

Semiconductor dopant profiling using secondary electron imaging in a scanning electron microscope (SEM) has been developed in recent years. In this paper, we show that the mechanis…