UTA versus line emission for EUVL: Studies on xenon emission at the NIST EBIT

K. Fahy, P. Dunne, L. Mckinney +9

Spectra from xenon ions have been recorded at the NIST EBIT and the emission into a 2% bandwidth at 13.5 nm arising from 4d-5p transitions compared with that from 4d-4f and 4p-4d t…