most citedSignificant tuning of dispersive mode coupling in doubly clamped MEMS beam resonators using thermally induced buckling effect

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physics.app-ph2024★ 1 cited

Significant tuning of dispersive mode coupling in doubly clamped MEMS beam resonators using thermally induced buckling effect

Chao Li, Qian Liu, Kohei Uchida +3

Dispersive mode coupling is a promising mechanism for the development of advanced micro/nanoelectromechanical devices. However, strong coupling strength remains a key challenge lim…