4 citations · 4 across the 2 of their papers we have counts for
2 papers
cond-mat.supr-con2024
Influence ScN protective thin layer on the superconducting properties of ultrathin NbN films
N. V. Porokhov, A. A. Anikanov, A. P. Sirotina +8
The present study delves into exploring the impact of a thin protective layer of scandium nitride (ScN) on the superconductive properties of thin films of niobium nitride (NbN) gen…
physics.app-ph2021★ 4 cited
Wet Scandium Etching for hard mask formation on a silicon substrate
Julia Bondareva, Ekaterina Timofeeva, Alexandr Anikanov +6
Nowadays, microelectronics and nanoelectronics require the search for new materials, including masks for creating structures. Today, the intermediate hard mask strategy is one of t…