most citedEvaluating Metal-Organic Precursors for Focused Ion Beam Induced Deposition through Solid-Layer Decomposition Analysis

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cond-mat.mes-hall2024★ 1 cited

Evaluating Metal-Organic Precursors for Focused Ion Beam Induced Deposition through Solid-Layer Decomposition Analysis

Benedykt R. Jany, Katarzyna Madajska, Aleksandra Butrymowicz-Kubiak +2

The development of modern metal deposition techniques like Focused Ion/Electron Beam Induced Deposition FIBID/FEBID relies heavily on the availability of metal-organic precursors o…