Ion Energy Tuning for Enhanced sp3 Carbon Fraction in Electron Cyclotron Resonance Ion Beam Deposited Diamond-Like Carbon Coatings: a Computational and Experimental Approach

Callum Wiseman, Marwa Ben Yaala Chalisa Gier, Laurent Marot +3

A novel high-energy electron cyclotron resonance (ECR) ion beam deposition (IBD) technique was used to fabricate DLC films at different ion beam energies. The ratios of sp2/sp3 bon…