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astro-ph.IM2021★ 2 cited
Generating Electron Beam Lithography Write Parameters from the FORTIS Holographic Grating Solution
Mackenzie Carlson, Stephan McCandliss, Randall McEntaffer +3
The Far-UV Off Rowland-circle Telescope for Imaging and Spectroscopy (FORTIS) has been successful in maturing technologies for carrying out multi-object spectroscopy in the far-UV,…
astro-ph.IM2021
Metrology for Measuring Custom Periodicities on Diffraction Gratings
Ningxiao Zhang, Randall McEntaffer, Ross McCurdy +1
We present a new, inexpensive, bench-top method for measuring groove period over large areas with high mapping resolution and high measurement accuracy, dubbed the grating mapper f…