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cond-mat.mtrl-sci2024
Direct electron beam writing of silver using a -diketonate precursor: first insights
Katja Höflich, Krzysztof Mackosz, Chinmai S. Jureddy +2
Direct electron beam writing is a powerful tool for fabricating complex nanostructures in a single step. The electron beam locally cleaves the molecules of an adsorbed gaseous prec…
cond-mat.mtrl-sci2023
Area Selective Chemical Vapor Deposition of Gold by Electron Beam Seeding
Aleksei Tsarapkin, Krzysztof Maćkosz, Chinmai Sai Jureddy +2
Chemical vapour deposition (CVD) is an established method for producing high-purity thin films, but it typically necessitates the pre- and post-processing of a mask to produce stru…