38 citations · 47 across the 4 of their papers we have counts for
5 papers
Microwave Loss in Low-Temperature ICPCVD Silicon Nitride: Dependence on Precursor Ratio and RF Substrate Bias
H. Athreya, J. Cornelison, M. Mikhailov +5
Low-loss dielectric films are an important component of superconducting circuits with applications ranging from quantum information to superconducting detectors for astrophysics. I…
Heterogeneous integration of amorphous silicon carbide on thin film lithium niobate
Zizheng Li, Naresh Sharma, Bruno Lopez-Rodriguez +6
In the past decade, lithium niobate (LiNbO3 or LN) photonics, thanks to its heat-free and fast electro-optical modulation, second-order non-linearities and low loss, has been exten…
Magic silicon dioxide for widely tunable integrated photonics
Bruno Lopez-Rodriguez, Naresh Sharma, Zizheng Li +6
Integrated photonic circuits have transformed data communication, biosensing, and light detection and ranging, and hold wide-ranging potential for optical computing, optical imagin…
High-Strength Amorphous Silicon Carbide for Nanomechanics
Minxing Xu, Dongil Shin, Paolo M. Sberna +4
For decades, mechanical resonators with high sensitivity have been realized using thin-film materials under high tensile loads. Although there have been remarkable strides in achie…
High-quality amorphous Silicon Carbide for hybrid photonic integration at low temperature
Bruno Lopez-Rodriguez, Roald Van Der Kolk, Samarth Aggarwal +9
Integrated photonic platforms have proliferated in recent years, each demonstrating its own unique strengths and shortcomings. However, given the processing incompatibilities of di…