3 citations · 3 across the 2 of their papers we have counts for
2 papers
cond-mat.mtrl-sci2024★ 3 cited
Rayleigh Wave Suppression in Al0.6Sc0.4N-on-SiC Resonators
Marco Liffredo, Silvan Stettler, Federico Peretti +1
We report on the fabrication of a Hybrid SAW/BAW resonator made of a thin layer of Sc-doped AlN (AlScN) with a Sc concentration of 40 at% on a 4H-SiC substrate. A Sezawa mode, exci…
eess.SY2024
More-than-Moore Microacoustics: A Scalable Fabrication Process for Suspended Lamb Wave Resonators
Marco Liffredo, Federico Peretti, Nan Xu +2
Deep Ultraviolet (DUV) Photolithography is currently used to fabricate mass-scale integrated circuits (ICs). Its high throughput and resolution could benefit large-scale RF MEMS pr…