34 citations · 35 across the 2 of their papers we have counts for
2 papers
eess.SY2024★ 1 cited
Active Compensation of Position Dependent Flexible Dynamics in High-Precision Mechatronics
Yorick Broens, Hans Butler, Ramidin Kamidi +2
Growing demands in the semiconductor industry necessitate increasingly stringent requirements on throughput and positioning accuracy of lithographic equipment. Meeting these demand…
eess.SY2023★ 34 cited
Physics-guided neural networks for feedforward control with input-to-state stability guarantees
Max Bolderman, Hans Butler, Sjirk Koekebakker +5
The increasing demand on precision and throughput within high-precision mechatronics industries requires a new generation of feedforward controllers with higher accuracy than exist…