3 papers
Measurements, simulations, and models of the point-spread function of electron-beam lithography
Nikolaj B. Hougs, Kristian S. Knudsen, Marcus Albrechtsen +3
When a sample is exposed using electron-beam lithography, the electrons scatter deep and far in the substrate, resulting in unwanted deposition of dose at both the nano- and the mi…
Multimode optomechanics with a two-dimensional optomechanical crystal
Guilhem Madiot, Marcus Albrechtsen, Clivia M. Sotomayor-Torres +2
Chip-scale multimode optomechanical systems have unique benefits for sensing, metrology and quantum technologies relative to their single-mode counterparts. Slot-mode optomechanica…
Design, fabrication, and characterization of electrostatic comb-drive actuators for nanoelectromechanical silicon photonics
Thor August Schimmell Weis, Babak Vosoughi Lahijani, Konstantinos Tsoukalas +2
Nanoelectromechanical systems offer unique functionalities in photonics: The ability to elastically and reversibly deform dielectric beams with subwavelength dimensions enable elec…