39 citations · 66 across the 3 of their papers we have counts for
1 paper · 2 filters
Masahiro Koike, Tsunehiro Ino, Yuuichi Kamimuta +5
The dielectric properties of noncrystalline hafnium silicon oxynitride (HfSiON) films with a variety of atomic compositions were investigated. The films were deposited by reactive…