134 citations · 160 across the 3 of their papers we have counts for
3 papers
Dynamic Imaging of Periodic Structures using Extreme Ultraviolet Scatterometry
Brendan McBennett, Michael Tanksalvala, Emma E. Nelson +10
Dynamic scattering and imaging with coherent, ultrafast, extreme ultraviolet (EUV) light sources can resolve charge, phonon and spin processes on their intrinsic length and time sc…
Non-Destructive, High-Resolution, Chemically Specific, 3D Nanostructure Characterization using Phase-Sensitive EUV Imaging Reflectometry
Michael Tanksalvala, Christina L. Porter, Yuka Esashi +22
Next-generation nano and quantum devices have increasingly complex 3D structure. As the dimensions of these devices shrink to the nanoscale, their performance is often governed by…
Universal behavior of highly-confined heat flow in semiconductor nanosystems: from nanomeshes to metalattices
Brendan McBennett, Albert Beardo, Emma E. Nelson +8
Nanostructuring on length scales corresponding to phonon mean free paths provides control over heat flow in semiconductors and makes it possible to engineer their thermal propertie…