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20032006
most citedInitial stage of the 2D-3D transition of a strained SiGe layer on a pit-patterned Si(001) template

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cond-mat.mtrl-sci2003

Transient-Enhanced Surface Diffusion on Native-Oxide-Covered Si(001) Nano-Structures during Vacuum Annealing

H. Lichtenberger, M. Muehlberger, F. Schaffler

We report on the transient-enhanced shape transformation of nano-structured Si(001) surfaces upon in vacuo annealing at relatively low temperatures of 1175K - 1225K for a few minut…