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physics.app-ph2018
Exploiting atomic layer deposition for fabricating sub-10 nm X-ray lenses
Benedikt Rösner, Frieder Koch, Florian Döring +12
Moving towards significantly smaller nanostructures, direct structuring techniques such as electron beam lithography approach fundamental limitations in feature size and aspect rat…
physics.app-ph2017★ 11 cited
Tunable kinoform x-ray beam splitter
Maxime Lebugle, Gediminas Seniutinas, Felix Marschall +3
We demonstrate an x-ray beam splitter with high performances for multi-kilo-electron-volt photons. The device is based on diffraction on kinoform structures, which overcome the lim…