57 citations · 208 across the 10 of their papers we have counts for
Showing 2023Show all
2 papers · 1 filter
physics.plasm-ph2023
Plasma sheath tailoring by a magnetic field for three-dimensional plasma etching
E. Jüngling, S. Wilczek, T. Mussenbrock +2
Three-dimensional (3D) etching of materials by plasmas is an ultimate challenge in microstructuring applications. A method is proposed to reach a controllable 3D structure by using…
cond-mat.soft2023
PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth
Teresa de los Arcos, Peter Awakowicz, Jan Benedikt +17
This feature article considers the analysis of the initial states of film growth on polymer substrates. The assembled results are based on the cooperation between research groups i…