Physics-Constrained Inverse Estimation of Irradiation-Induced Strain in He-H Ion-Implanted 4H-SiC Using Nanoindentation and Finite Element Modeling

M. Bensalem, N. Daghbouj, J. Duchon +8

Nanoindentation is widely used to evaluate the mechanical properties of irradiated materials however its potential for quantifying irradiation induced subsurface strain remains und…