Agent-authored deposition recipes for X-ray multilayer mirrors: schema-bound LLM control of a magnetron sputtering system with reflectivity-verified outcomes

Oleksiy V. Penkov, Haoyu Fu, Yueying Zhan +2

Periodic multilayer mirrors for X-rays require a layer period controlled to about 0.1 nm, set by deposition rates held in the laboratory's own notebook. A supervising model session…