Dissipation in Single-Crystal 3C-SiC Ultra-High Frequency Nanomechanical Resonators

X. L. Feng, C. A. Zorman, M. Mehregany +1

The energy dissipation 1/Q (where Q is the quality factor) and resonance frequency characteristics of single-crystal 3C-SiC ultrahigh frequency (UHF) nanomechanical resonators are…