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physics.optics2008★ 142 cited
Optical and mechanical design of a "zipper" photonic crystal optomechanical cavity
Jasper Chan, Matt Eichenfield, Ryan Camacho +1
Design of a doubly-clamped beam structure capable of localizing mechanical and optical energy at the nanoscale is presented. The optical design is based upon photonic crystal conce…
physics.optics2008★ 707 cited
A picogram and nanometer scale photonic crystal opto-mechanical cavity
M. Eichenfield, R. Camacho, J. Chan +2
We describe the design, fabrication, and measurement of a cavity opto-mechanical system consisting of two nanobeams of silicon nitride in the near-field of each other, forming a so…