20 citations · 33 across the 2 of their papers we have counts for
2 papers
physics.optics2006★ 13 cited
Rigorous Simulation of 3D Masks
S. Burger, R. Köhle, L. Zschiedrich +4
We perform 3D lithography simulations by using a finite-element solver. To proof applicability to real 3D problems we investigate DUV light propagation through a structure of size…
physics.optics2006★ 20 cited
Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation
S. Burger, R. Köhle, L. Zschiedrich +4
An extremely fast time-harmonic finite element solver developed for the transmission analysis of photonic crystals was applied to mask simulation problems. The applicability was pr…