Stoichiometry control of magnetron sputtered Bi${}_2$Sr${}_2$Ca${}_{1-x}$Y${}_x$Cu${}_2$O${}_y$ (0$\le$x$\le$0.5) thin film, composition spread libraries: Substrate bias and gas density factors

R. J. Sanderson, K. C. Hewitt

A magnetron sputtering method for the production of thin-film libraries with a spatially varying composition, x, in Bi2Sr2Ca1-xYxCu2Oy (0<=x<=0.5) has been developed. Two targets w…