2 papers
cs.OH2008★ 1 cited
0-level Vacuum Packaging RT Process for MEMS Resonators
N. Abelé, D. Grogg, C. Hibert +3
A new Room Temperature (RT) 0-level vacuum package is demonstrated in this work, using amorphous silicon (aSi) as sacrificial layer and SiO2 as structural layer. The process is com…
cs.OH2008
Fabrication of MEMS Resonators in Thin SOI
D. Grogg, Nicoleta Diana Badila-Ciressan, Adrian Mihai Ionescu
A simple and fast process for micro-electromechanical (MEM) resonators with deep sub-micron transduction gaps in thin SOI is presented in this paper. Thin SOI wafers are important…