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physics.app-ph2018

Modeling and Thermal Metrology of Thermally Isolated MEMS Electrothermal Actuators for Strain Engineering of 2D Materials

Mounika Vutukuru, Jason W. Christopher, Corey Pollock +2

We present electrothermal microelectromechanical (MEMS) actuators as a practical platform for straining 2D materials. The advantages of the electrothermal actuator is its high outp…