Influence of oxygen vacancy on the electronic structure of HfO${}_2$ film

Deok-Yong Cho, Jae-Min Lee, S. -J. Oh +4

We investigated the unoccupied part of the electronic structure of the oxygen-deficient hafnium oxide (HfO${}_{\sim 1.8}$) using soft x-ray absorption spectroscopy at O $K$ and Hf $N_…