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physics.optics2022
Inverse Design of High-NA Metalens for Maskless Lithography
Haejun Chung, Feng Zhang, Hao Li +2
We demonstrate an axisymmetric inverse-designed metalens to improve the performance of zone-plate-array lithography (ZPAL), one of the maskless lithography approaches, that offer a…
physics.optics2022★ 1 cited
All electromagnetic scattering bodies are matrix-valued oscillators
Lang Zhang, Francesco Monticone, Owen D. Miller
In this article, we introduce a new viewpoint on electromagnetic scattering. Tailoring spectral electromagnetic response underpins important applications ranging from sensing to en…