Enhanced electron-beam lithography to reduce the frequency scatter of 200-400 GHz superconducting microstrip resonators for on-chip filterbank spectrometers

L. G. G. Olde Scholtenhuis, D. J. Thoen, J. J. A. Baselmans +4

Integrated superconducting spectrometers (ISSs) provide the instantaneous bandwidth, sensitivity, and scalable architecture for large-scale spectroscopic surveys in submillimeter-w…