46 citations · 309 across the 14 of their papers we have counts for
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physics.app-ph2018★ 46 cited
Towards Sub-micrometer High Aspect Ratio X-ray Gratings by Atomic Layer Deposition of Iridium
Joan Vila-Comamala, Lucia Romano, Vitaliy Guzenko +3
X-ray grating interferometry is an excellent technique for X-ray phase contrast imaging and X-ray wavefront sensing with applications in materials science, biology and medical diag…
physics.app-ph2018★ 43 cited
Exploiting atomic layer deposition for fabricating sub-10 nm X-ray lenses
Benedikt Rösner, Frieder Koch, Florian Döring +12
Moving towards significantly smaller nanostructures, direct structuring techniques such as electron beam lithography approach fundamental limitations in feature size and aspect rat…