High-Beam-Quality Meta-Grating Couplers for Large Collimated Free-Space Beams on Silicon-on-Insulator

Max Schittenhelm, Sebastian Häfner, Steffen Sauer +1

Photonic integrated circuits on the silicon-on-insulator (SOI) platform typically interface with free space via grating couplers, but scaling these to collimated beams with diamete…