Fast Homoepitaxy on (100) \b{eta}-Ga2O3 Substrates with Large Grown-In Offcut

M. Brooks Tellekamp, Drew Haven, David Joyce +7

The choice of crystalline orientation and offcut angle is non-trivial for low-symmetry $\beta {\text{-Ga}}_2{\text{O}}_3$, where anisotropy impacts bulk and thin film synthesis, material pr…