60 citations · 139 across the 7 of their papers we have counts for
7 papers
SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography
Thomas Van Caekenberghe, Paul Steinacker, Bart Raes +31
The realization of large-scale silicon quantum processors requires spin qubits compatible with advanced semiconductor manufacturing technologies, demanding lithographic processes t…
Ultra-high Q-factor superconducting tantalum resonators on 300 mm Si wafers
R. Acharya, D. Perez Lozano, Ts. Ivanov +13
Superconducting resonators are central to superconducting quantum information technologies and essential for bosonic qubit architectures, where long-lived storage modes enable hard…
Understanding oxide-thickness-dependent variability in dense Si-MOS quantum dot arrays
Arne Loenders, Jacques Van Damme, Clement Godfrin +19
Achieving uniform and scalable control of semiconductor spin qubits remains a key challenge for large scale quantum computing. In this work, we investigate how gate oxide thickness…
High-coherence superconducting qubits made using industry-standard, advanced semiconductor manufacturing
Jacques Van Damme, Shana Massar, Rohith Acharya +13
The development of superconducting qubit technology has shown great potential for the construction of practical quantum computers. As the complexity of quantum processors continues…
Argon milling induced decoherence mechanisms in superconducting quantum circuits
J. Van Damme, Ts. Ivanov, P. Favia +12
The fabrication of superconducting circuits requires multiple deposition, etch and cleaning steps, each possibly introducing material property changes and microscopic defects. In t…
Manufacturing high-Q superconducting α-tantalum resonators on silicon wafers
D. P. Lozano, M. Mongillo, X. Piao +19
The performance of state-of-the-art superconducting quantum devices is currently limited by microwave dielectric losses at different surfaces and interfaces. α-tantalum is a superc…
Path toward manufacturable superconducting qubits with relaxation times exceeding 0.1 ms
J. Verjauw, R. Acharya, J. Van Damme +11
As the superconducting qubit platform matures towards ever-larger scales in the race towards a practical quantum computer, limitations due to qubit inhomogeneity through lack of pr…