3 papers
physics.plasm-ph2026
Simulation Studies of Resonant Excitation of Electron Bernstein Waves in Capacitive Discharges
Deepak Gautam, Sarveshwar Sharma, Igor Kaganovich +1
The behavior of capacitive coupled plasma (CCP) discharges is investigated in a mildly magnetized regime, defined by the condition 1 2, where …
physics.plasm-ph2024
Effect of gas pressure on plasma asymmetry and higher harmonics generation in sawtooth waveform driven capacitively coupled plasma discharge
Sarveshwar Sharma, Miles Turner, Nishant Sirse
Using particle-in-cell (PIC) simulation technique, the effect of gas pressure (5-500 mTorr) on the plasma spatial asymmetry, ionization rate, metastable gas densities profile, elec…
physics.plasm-ph2024
Experimental investigation of an electronegative cylindrical capacitively coupled geometrically asymmetric plasma discharge with an axisymmetric magnetic field
Swati Dahiya, Narayan Sharma, Shivani Geete +3
In this study, we have investigated the production of negative ions by mixing electronegative oxygen gas with electropositive argon gas in a geometrically asymmetric cylindrical ca…