3 papers
cs.CE2026
Real-to-Sim Calibration of Bosch Etching Simulators with Few-Shot XSEM Data and Hybrid Search
Xinyu Jia, Jainil Shah, Rahul Tripathi +2
The Bosch process is widely used in MEMS and TSV fabrication, but accurate prediction of etching outcomes remains difficult without calibration against real measurements, which are…
cond-mat.mes-hall2026
Process-Technology Co-optimization for 2D-FETs
Shao-Heng Yang, Jainil Dharmil Shah, Mayukh Das +15
We present the first experimental machine learning (ML)-enabled Process-Technology Co-Optimization (PTCO) framework for optimizing 2D transition metal dichalcogenide (TMD) FET fabr…
cs.AI2026
Triple-Bottom-Line Sustainability of Language Models for Edge AI: A Comparison Between SLMs and Quantized LLMs
Jainil Dharmil Shah
Edge-AI model selection is commonly driven by one isolated metric - accuracy, latency, memory, energy, or safety, even though a deployable language model must balance all five. Our…